General Introduction

Yokogawa OX400 zirconia oxygen analyzer is a highly accurate and reliable low-concentration type which is capable of measuring a wide range of concentrations, from 0-10ppm up to 0-100vol% O2. Aproprietary new thin-film deposition technology was used in the zirconia sensor that creates a molecular bond between the zirconia element and the platinum layer. This prevents separation, enables a reduction in sensor size and ensures a high-speed response and long life. The OX400 can be used to control and monitor various semiconductor applications, and to control environment, air leakage into inert gas, and other processes.

General Specification

Main Characters

Description

Measurement object

Oxygen concentrations in inert gases containing   no flammable gas, silica, corrosive gas, or liquid (including water vapor).

Measurement system

Zirconia system

Sampling method

Pump, aspirator, or no suction device

Sample gas conditions

Flow rate 200 ± 25 ml/min, Temperature 0   to 50°C, Pressure 0 to 300 Pa gauge

Measurement range

0-10ppm O2 to 0-100vol% O2

Display

4 digit LED, %, ppm

Analog output

2 outputs, 4 to 20mA DC and voltage 0-1V,   or 0-5V, or 0-10 V DC

Contact output

3 outputs

Self-diagnostics

Error (failure), Alarm (warning)

Serial communication

RS-232 , one way

Warm-up time

Within 20 min

Power supply

100 - 120 V AC/200 - 240 V AC,50/60 Hz


3.Model Selection

Model

Suffix Codes

Description

OX400







Low Concentration Zirconia Oxygen Analyzer

Power supply

-5






100-120   V AC

-3






200-240   V AC

Sampling method


-P





Built-in   pump


-A





With   aspirator


-N





No   suction device

Line connection



-R




Rc 1/4



-T




1/4 NPT

User’s manual




-J



Japanese




-E



English

Power cable





-D


UL/CSA cable (2 m)





-F


VDE cable (2.5 m)





-H


GB cable (2.5 m)





-Q


BS cable (2 m)





-R


SAA cable (2.5 m)

Options






/P

Panel mount






/MS

Multi selector function






/A

Activated carbon filter